Defects in H implanted GaAs studied by ion-beam and low-energy positron techniques

Ion-beam and low-energy positron-beam techniques have been used to study damage and implanted ion distributions and their annealing behavior in semi-insulating GaAs after the room temperature implantation of 3 × 10¹⁵-1 × 10¹⁷ 60 keV H⁺ cm^-2. The redistribution of the implanted H during annealing was observed to be connected to the migration of implantation-induced defect-complexes. A huge increase in the displaced atom concentration in the region of the H concentration was observed after annealings. A monovacancy overlayer, dissociation of H-vacancy complexes, and formation of stable vacancy-H agglomerates were observed in the different parts of the slowing-down region of the implanted H.