Detection of stable positive fixed charges in AlOx activated during annealing with in situ modulated PhotoLuminescence

Anatole Desthieux; Mengkoing Sreng; Pavel Bulkin; Ileana Florea; Etienne Drahi; Barbara Bazer-Bachi; Jean Charles Vanel; François Silva; Jorge Posada; Pere Roca i Cabarrocas

doi:10.1016/j.solmat.2021.111172

Detection of stable positive fixed charges in AlO_x activated during annealing with in situ modulated PhotoLuminescence

Anatole Desthieux
, Mengkoing Sreng
, Pavel Bulkin
, Ileana Florea
, Etienne Drahi
, Barbara Bazer-Bachi
, Jean Charles Vanel
, François Silva
, Jorge Posada
, Pere Roca i Cabarrocas

Lamsid/EDF/R and D
Institut Photovoltaïque d'Ile-de-France
Total
Photowatt International

Résultats de recherche: Contribution à un journal › Article › Revue par des pairs

7 Citations (Scopus)

Résumé

An in situ Modulated Photoluminescence (MPL) measurement setup mounted on a Plasma Enhanced Chemical Vapor Deposition (PECVD) reactor is described. A method for deriving the actual minority carrier lifetime at the specific injection level of 1.10¹⁵ cm⁻³ is presented. This tool was used in a case study to monitor the passivation properties of aluminum oxide (AlO_x) thin films upon annealing. Interesting kinetics, such as a drop of lifetime at temperatures higher than 250 °C along with a recovery of the lifetime during the cooling phase, are shown. Moreover, these in situ results combined with ex situ studies allowed us to demonstrate the formation a stable high positive fixed charge density in the AlO_x layer (+1.10¹² cm⁻²) as a consequence of the combination of annealing and light exposure.

langue originale	Anglais
Numéro d'article	111172
journal	Solar Energy Materials and Solar Cells
Volume	230
Les DOIs	https://doi.org/10.1016/j.solmat.2021.111172
état	Publié - 15 sept. 2021

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Accès au document

10.1016/j.solmat.2021.111172

Contient cette citation

Desthieux, A., Sreng, M., Bulkin, P., Florea, I., Drahi, E., Bazer-Bachi, B., Vanel, J. C., Silva, F., Posada, J., & Roca i Cabarrocas, P. (2021). Detection of stable positive fixed charges in AlO_x activated during annealing with in situ modulated PhotoLuminescence. Solar Energy Materials and Solar Cells, 230, Article 111172. https://doi.org/10.1016/j.solmat.2021.111172

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title = "Detection of stable positive fixed charges in AlOx activated during annealing with in situ modulated PhotoLuminescence",

abstract = "An in situ Modulated Photoluminescence (MPL) measurement setup mounted on a Plasma Enhanced Chemical Vapor Deposition (PECVD) reactor is described. A method for deriving the actual minority carrier lifetime at the specific injection level of 1.1015 cm−3 is presented. This tool was used in a case study to monitor the passivation properties of aluminum oxide (AlOx) thin films upon annealing. Interesting kinetics, such as a drop of lifetime at temperatures higher than 250 °C along with a recovery of the lifetime during the cooling phase, are shown. Moreover, these in situ results combined with ex situ studies allowed us to demonstrate the formation a stable high positive fixed charge density in the AlOx layer (+1.1012 cm−2) as a consequence of the combination of annealing and light exposure.",

keywords = "Aluminum oxide, Annealing, Fixed charges, In situ, Modulated photoluminescence, Silicon solar cells",

author = "Anatole Desthieux and Mengkoing Sreng and Pavel Bulkin and Ileana Florea and Etienne Drahi and Barbara Bazer-Bachi and Vanel, \{Jean Charles\} and Fran{\c c}ois Silva and Jorge Posada and \{Roca i Cabarrocas\}, Pere",

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doi = "10.1016/j.solmat.2021.111172",

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T1 - Detection of stable positive fixed charges in AlOx activated during annealing with in situ modulated PhotoLuminescence

AU - Desthieux, Anatole

AU - Sreng, Mengkoing

AU - Bulkin, Pavel

AU - Florea, Ileana

AU - Drahi, Etienne

AU - Bazer-Bachi, Barbara

AU - Vanel, Jean Charles

AU - Silva, François

AU - Posada, Jorge

AU - Roca i Cabarrocas, Pere

PY - 2021/9/15

Y1 - 2021/9/15

N2 - An in situ Modulated Photoluminescence (MPL) measurement setup mounted on a Plasma Enhanced Chemical Vapor Deposition (PECVD) reactor is described. A method for deriving the actual minority carrier lifetime at the specific injection level of 1.1015 cm−3 is presented. This tool was used in a case study to monitor the passivation properties of aluminum oxide (AlOx) thin films upon annealing. Interesting kinetics, such as a drop of lifetime at temperatures higher than 250 °C along with a recovery of the lifetime during the cooling phase, are shown. Moreover, these in situ results combined with ex situ studies allowed us to demonstrate the formation a stable high positive fixed charge density in the AlOx layer (+1.1012 cm−2) as a consequence of the combination of annealing and light exposure.

AB - An in situ Modulated Photoluminescence (MPL) measurement setup mounted on a Plasma Enhanced Chemical Vapor Deposition (PECVD) reactor is described. A method for deriving the actual minority carrier lifetime at the specific injection level of 1.1015 cm−3 is presented. This tool was used in a case study to monitor the passivation properties of aluminum oxide (AlOx) thin films upon annealing. Interesting kinetics, such as a drop of lifetime at temperatures higher than 250 °C along with a recovery of the lifetime during the cooling phase, are shown. Moreover, these in situ results combined with ex situ studies allowed us to demonstrate the formation a stable high positive fixed charge density in the AlOx layer (+1.1012 cm−2) as a consequence of the combination of annealing and light exposure.

KW - Aluminum oxide

KW - Annealing

KW - Fixed charges

KW - In situ

KW - Modulated photoluminescence

KW - Silicon solar cells

U2 - 10.1016/j.solmat.2021.111172

DO - 10.1016/j.solmat.2021.111172

M3 - Article

AN - SCOPUS:85105802782

SN - 0927-0248

VL - 230

JO - Solar Energy Materials and Solar Cells

JF - Solar Energy Materials and Solar Cells

M1 - 111172