Résumé
The capabilities and limitations of the well-known C-V technique for the determination of the conduction band offsets in (n)a-Si:H/(p)c-Si heterojunctions are presented. In particular, the effects due to the presence of an inversion layer in c-Si and a non-negligible defect density at the a-Si:H/c-Si interface on the reliability of the C-V intercept method are discussed. The influence of the Fermi level positions in (p)c-Si and (n)a-Si:H on the inversion layer formation and the influence of the interface defect density have been analysed using numerical simulations and experimental measurements.
| langue originale | Anglais |
|---|---|
| Pages (de - à) | 7481-7485 |
| Nombre de pages | 5 |
| journal | Thin Solid Films |
| Volume | 515 |
| Numéro de publication | 19 SPEC. ISS. |
| Les DOIs | |
| état | Publié - 16 juil. 2007 |
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