@inproceedings{e4edceca6f61406fa551e2ce7b8e29fc,
title = "Drilled dielectric membranes for highly resonant filtering in the infrared",
abstract = "Subwavelength dielectric and metallic gratings embedded in vacuum can act as highly-resonant spectral filters. We review the theoretical principles for the design of symmetric dielectric and metal gratings to conceive efficient optical filters in the mid and far infrared range, and we show how both resonance width and resonance wavelength can be tuned. We describe an original process for the fabrication of free-standing SiC gratings, and we present the first samples obtained with 10 μm period. Experimental angularly resolved transmission spectra show evidences of their filtering properties.",
keywords = "Gratings, Microfabrication, Optical filter, Subwavelength",
author = "G. Vincent and C. Billaudeau and S. Collin and R. Ha{\"i}dar and A. Madouri and D. Chouteau and M. Laroche and N. Gu{\'e}rineau and F. Pardo and Pelouard, \{J. L.\}",
year = "2007",
month = dec,
day = "7",
doi = "10.1117/12.722045",
language = "English",
isbn = "0819467197",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Nanotechnology III",
note = "Nanotechnology III ; Conference date: 02-05-2007 Through 04-05-2007",
}