Résumé
We report measurements of the breakdown curves of a radio-frequency capacitive discharge in low pressure ammonia. The electron drift velocity was determined from the location of turning points in the breakdown curves in the range of E/p = 42-713V cm-1 Torr-1. We compare our results to values calculated from the published cross-sections in the range E/p = 1-5000 V cm-1 Torr-1 and find good agreement.
| langue originale | Anglais |
|---|---|
| Pages (de - à) | 872-876 |
| Nombre de pages | 5 |
| journal | Journal of Physics D: Applied Physics |
| Volume | 38 |
| Numéro de publication | 6 |
| Les DOIs | |
| état | Publié - 21 mars 2005 |
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