Résumé
We report measurements of the breakdown curves of an rf capacitive discharge in low pressure nitrous oxide. The electron drift velocity was determined from the locations of the turning point and of the minimum in the breakdown curves in the range E/p = 87-840 V cm-1 Torr-1. We compare our results with values calculated from the published cross-sections in the range E/p = 1-5000 V cm-1 Torr-1 and find good agreement.
| langue originale | Anglais |
|---|---|
| Pages (de - à) | 1866-1871 |
| Nombre de pages | 6 |
| journal | Journal of Physics D: Applied Physics |
| Volume | 39 |
| Numéro de publication | 9 |
| Les DOIs | |
| état | Publié - 5 mai 2006 |
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