Electron drift velocity in silane in strong electric fields determined from rf breakdown curves

V. Lisovskiy; J. P. Booth; K. Landry; D. Douai; V. Cassagne; V. Yegorenkov

doi:10.1088/0022-3727/40/11/022

Electron drift velocity in silane in strong electric fields determined from rf breakdown curves

V. Lisovskiy
, J. P. Booth
, K. Landry
, D. Douai
, V. Cassagne
, V. Yegorenkov

Kharkov National University
Unaxis Displays Division France SAS
CEA Cadarache
Riber

Résultats de recherche: Contribution à un journal › Article › Revue par des pairs

Résumé

We report measurements of the breakdown curves of an rf capacitive discharge in low pressure silane. The electron drift velocity was determined from the locations of the turning point and of the minimum in the breakdown curves in the range E/p ≤ 145-1292 V cm^-1 Torr^-1. We compare our results to values calculated from the published cross-sections in the range E/p ≤ 1-2000 V cm^-1 Torr^-1 and data calculated in other papers and find good agreement.

langue originale	Anglais
Numéro d'article	022
Pages (de - à)	3408-3410
Nombre de pages	3
journal	Journal of Physics D: Applied Physics
Volume	40
Numéro de publication	11
Les DOIs	https://doi.org/10.1088/0022-3727/40/11/022
état	Publié - 7 juin 2007

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10.1088/0022-3727/40/11/022

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title = "Electron drift velocity in silane in strong electric fields determined from rf breakdown curves",

abstract = "We report measurements of the breakdown curves of an rf capacitive discharge in low pressure silane. The electron drift velocity was determined from the locations of the turning point and of the minimum in the breakdown curves in the range E/p ≤ 145-1292 V cm-1 Torr-1. We compare our results to values calculated from the published cross-sections in the range E/p ≤ 1-2000 V cm-1 Torr-1 and data calculated in other papers and find good agreement.",

author = "V. Lisovskiy and Booth, \{J. P.\} and K. Landry and D. Douai and V. Cassagne and V. Yegorenkov",

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AU - Lisovskiy, V.

AU - Booth, J. P.

AU - Landry, K.

AU - Douai, D.

AU - Cassagne, V.

AU - Yegorenkov, V.

PY - 2007/6/7

Y1 - 2007/6/7

N2 - We report measurements of the breakdown curves of an rf capacitive discharge in low pressure silane. The electron drift velocity was determined from the locations of the turning point and of the minimum in the breakdown curves in the range E/p ≤ 145-1292 V cm-1 Torr-1. We compare our results to values calculated from the published cross-sections in the range E/p ≤ 1-2000 V cm-1 Torr-1 and data calculated in other papers and find good agreement.

AB - We report measurements of the breakdown curves of an rf capacitive discharge in low pressure silane. The electron drift velocity was determined from the locations of the turning point and of the minimum in the breakdown curves in the range E/p ≤ 145-1292 V cm-1 Torr-1. We compare our results to values calculated from the published cross-sections in the range E/p ≤ 1-2000 V cm-1 Torr-1 and data calculated in other papers and find good agreement.

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U2 - 10.1088/0022-3727/40/11/022

DO - 10.1088/0022-3727/40/11/022

M3 - Article

AN - SCOPUS:34249291954

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JO - Journal of Physics D: Applied Physics

JF - Journal of Physics D: Applied Physics

IS - 11

M1 - 022

ER -

Electron drift velocity in silane in strong electric fields determined from rf breakdown curves

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