Experimental study of disorder and defects in undoped a-Si:H as a function of annealing and hydrogen evolution

K. Zellama; J. H. von Bardeleben; V. Quillet; Y. Bouizem; P. Sládek; M. L. Thèye; P. Roca i Cabarrocas

doi:10.1016/0022-3093(93)90546-A

Experimental study of disorder and defects in undoped a-Si:H as a function of annealing and hydrogen evolution

K. Zellama
, J. H. von Bardeleben
, V. Quillet
, Y. Bouizem
, P. Sládek
, M. L. Thèye
, P. Roca i Cabarrocas

CNRS

Résultats de recherche: Contribution à un journal › Article › Revue par des pairs

7 Citations (Scopus)

Résumé

Information on the incorporation of hydrogen and its effects on the disorder and the defects in undoped PECVD a-Si:H films deposited under different conditions is gained from systematicannealing studies up to 500-600°C. The results reveal a better bonded hydrogen stability in he samples deposited at high rate, related to their particular microstructure.

langue originale	Anglais
Pages (de - à)	285-288
Nombre de pages	4
journal	Journal of Non-Crystalline Solids
Volume	164-166
Numéro de publication	PART 1
Les DOIs	https://doi.org/10.1016/0022-3093(93)90546-A
état	Publié - 2 déc. 1993

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10.1016/0022-3093(93)90546-A

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title = "Experimental study of disorder and defects in undoped a-Si:H as a function of annealing and hydrogen evolution",

abstract = "Information on the incorporation of hydrogen and its effects on the disorder and the defects in undoped PECVD a-Si:H films deposited under different conditions is gained from systematicannealing studies up to 500-600°C. The results reveal a better bonded hydrogen stability in he samples deposited at high rate, related to their particular microstructure.",

author = "K. Zellama and \{von Bardeleben\}, \{J. H.\} and V. Quillet and Y. Bouizem and P. Sl{\'a}dek and Th{\`e}ye, \{M. L.\} and \{Roca i Cabarrocas\}, P.",

year = "1993",

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doi = "10.1016/0022-3093(93)90546-A",

language = "English",

volume = "164-166",

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T1 - Experimental study of disorder and defects in undoped a-Si:H as a function of annealing and hydrogen evolution

AU - Zellama, K.

AU - von Bardeleben, J. H.

AU - Quillet, V.

AU - Bouizem, Y.

AU - Sládek, P.

AU - Thèye, M. L.

AU - Roca i Cabarrocas, P.

PY - 1993/12/2

Y1 - 1993/12/2

N2 - Information on the incorporation of hydrogen and its effects on the disorder and the defects in undoped PECVD a-Si:H films deposited under different conditions is gained from systematicannealing studies up to 500-600°C. The results reveal a better bonded hydrogen stability in he samples deposited at high rate, related to their particular microstructure.

AB - Information on the incorporation of hydrogen and its effects on the disorder and the defects in undoped PECVD a-Si:H films deposited under different conditions is gained from systematicannealing studies up to 500-600°C. The results reveal a better bonded hydrogen stability in he samples deposited at high rate, related to their particular microstructure.

U2 - 10.1016/0022-3093(93)90546-A

DO - 10.1016/0022-3093(93)90546-A

M3 - Article

AN - SCOPUS:0027907070

SN - 0022-3093

VL - 164-166

SP - 285

EP - 288

JO - Journal of Non-Crystalline Solids

JF - Journal of Non-Crystalline Solids

IS - PART 1

ER -

Experimental study of disorder and defects in undoped a-Si:H as a function of annealing and hydrogen evolution

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