Fast and Accurate Predictions of MEMS Micromirrors Nonlinear Dynamic Response Using Direct Computation of Invariant Manifolds

Andrea Opreni; Alessandra Vizzaccaro; Nicolo Boni; Roberto Carminati; Gianluca Mendicino; Cyril Touze; Attilio Frangi

doi:10.1109/MEMS51670.2022.9699545

Fast and Accurate Predictions of MEMS Micromirrors Nonlinear Dynamic Response Using Direct Computation of Invariant Manifolds

Andrea Opreni
, Alessandra Vizzaccaro
, Nicolo Boni
, Roberto Carminati
, Gianluca Mendicino
, Cyril Touze
, Attilio Frangi

Politecnico di Milano
University of Bristol
STMicroelectronics Italia

Résultats de recherche: Le chapitre dans un livre, un rapport, une anthologie ou une collection › Contribution à une conférence › Revue par des pairs

Résumé

The Direct Parametrisation of Invariant Manifolds (DPIM) is an innovative technique for Model Order Reduction (MOR) suitable for Micro-Electro-Mechanical Systems (MEMS) that operate at resonance, as most gyroscopes and scanning micromirrors. The computational performance and the sound mathematical foundation of the method allows identifying the nonlinear dynamic response of MEMS within short time spans and in a ulation-free con. For the first time, predictions of the method are compared with experimental data. Results highlight the remarkable industrial impact of the technique for accelerating the design of MEMS structures actuated at resonance.

langue originale	Anglais
titre	35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Editeur	Institute of Electrical and Electronics Engineers Inc.
Pages	491-494
Nombre de pages	4
ISBN (Electronique)	9781665409117
Les DOIs	https://doi.org/10.1109/MEMS51670.2022.9699545
état	Publié - 1 janv. 2022
Evénement	35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 - Tokyo, Japon Durée: 9 janv. 2022 → 13 janv. 2022

Série de publications

Nom	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2022-January
ISSN (imprimé)	1084-6999

Une conférence

Une conférence	35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Pays/Territoire	Japon
La ville	Tokyo
période	9/01/22 → 13/01/22

Accès au document

10.1109/MEMS51670.2022.9699545

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Opreni, A., Vizzaccaro, A., Boni, N., Carminati, R., Mendicino, G., Touze, C., & Frangi, A. (2022). Fast and Accurate Predictions of MEMS Micromirrors Nonlinear Dynamic Response Using Direct Computation of Invariant Manifolds. Dans 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 (p. 491-494). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol 2022-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMS51670.2022.9699545

Opreni, Andrea ; Vizzaccaro, Alessandra ; Boni, Nicolo et al. / Fast and Accurate Predictions of MEMS Micromirrors Nonlinear Dynamic Response Using Direct Computation of Invariant Manifolds. 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. Institute of Electrical and Electronics Engineers Inc., 2022. p. 491-494 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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title = "Fast and Accurate Predictions of MEMS Micromirrors Nonlinear Dynamic Response Using Direct Computation of Invariant Manifolds",

abstract = "The Direct Parametrisation of Invariant Manifolds (DPIM) is an innovative technique for Model Order Reduction (MOR) suitable for Micro-Electro-Mechanical Systems (MEMS) that operate at resonance, as most gyroscopes and scanning micromirrors. The computational performance and the sound mathematical foundation of the method allows identifying the nonlinear dynamic response of MEMS within short time spans and in a ulation-free con. For the first time, predictions of the method are compared with experimental data. Results highlight the remarkable industrial impact of the technique for accelerating the design of MEMS structures actuated at resonance.",

keywords = "Invariant Manifold, Micromirrors, Model Order Reduction, Piezoelectric",

author = "Andrea Opreni and Alessandra Vizzaccaro and Nicolo Boni and Roberto Carminati and Gianluca Mendicino and Cyril Touze and Attilio Frangi",

note = "Publisher Copyright: {\textcopyright} 2022 IEEE.; 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 ; Conference date: 09-01-2022 Through 13-01-2022",

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Opreni, A, Vizzaccaro, A, Boni, N, Carminati, R, Mendicino, G, Touze, C & Frangi, A 2022, Fast and Accurate Predictions of MEMS Micromirrors Nonlinear Dynamic Response Using Direct Computation of Invariant Manifolds. Dans 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), VOL. 2022-January, Institute of Electrical and Electronics Engineers Inc., p. 491-494, 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022, Tokyo, Japon, 9/01/22. https://doi.org/10.1109/MEMS51670.2022.9699545

Fast and Accurate Predictions of MEMS Micromirrors Nonlinear Dynamic Response Using Direct Computation of Invariant Manifolds. / Opreni, Andrea; Vizzaccaro, Alessandra; Boni, Nicolo et al.
35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. Institute of Electrical and Electronics Engineers Inc., 2022. p. 491-494 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol 2022-January).

Résultats de recherche: Le chapitre dans un livre, un rapport, une anthologie ou une collection › Contribution à une conférence › Revue par des pairs

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T1 - Fast and Accurate Predictions of MEMS Micromirrors Nonlinear Dynamic Response Using Direct Computation of Invariant Manifolds

AU - Opreni, Andrea

AU - Vizzaccaro, Alessandra

AU - Boni, Nicolo

AU - Carminati, Roberto

AU - Mendicino, Gianluca

AU - Touze, Cyril

AU - Frangi, Attilio

PY - 2022/1/1

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N2 - The Direct Parametrisation of Invariant Manifolds (DPIM) is an innovative technique for Model Order Reduction (MOR) suitable for Micro-Electro-Mechanical Systems (MEMS) that operate at resonance, as most gyroscopes and scanning micromirrors. The computational performance and the sound mathematical foundation of the method allows identifying the nonlinear dynamic response of MEMS within short time spans and in a ulation-free con. For the first time, predictions of the method are compared with experimental data. Results highlight the remarkable industrial impact of the technique for accelerating the design of MEMS structures actuated at resonance.

AB - The Direct Parametrisation of Invariant Manifolds (DPIM) is an innovative technique for Model Order Reduction (MOR) suitable for Micro-Electro-Mechanical Systems (MEMS) that operate at resonance, as most gyroscopes and scanning micromirrors. The computational performance and the sound mathematical foundation of the method allows identifying the nonlinear dynamic response of MEMS within short time spans and in a ulation-free con. For the first time, predictions of the method are compared with experimental data. Results highlight the remarkable industrial impact of the technique for accelerating the design of MEMS structures actuated at resonance.

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KW - Piezoelectric

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Opreni A, Vizzaccaro A, Boni N, Carminati R, Mendicino G, Touze C et al. Fast and Accurate Predictions of MEMS Micromirrors Nonlinear Dynamic Response Using Direct Computation of Invariant Manifolds. Dans 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. Institute of Electrical and Electronics Engineers Inc. 2022. p. 491-494. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMS51670.2022.9699545

Fast and Accurate Predictions of MEMS Micromirrors Nonlinear Dynamic Response Using Direct Computation of Invariant Manifolds

Résumé

Série de publications

Une conférence

Accès au document

Autres fichiers et liens

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Contient cette citation