TY - GEN
T1 - High resolution real-time full-field interference microscopy
AU - Dubois, Arnaud
AU - Lebec, Martial
AU - Beaurepaire, Emmanuel
AU - Leveque, Sandrine
AU - Boccara, Claude
PY - 1999/1/1
Y1 - 1999/1/1
N2 - We have built an interference microscope that produces in real-time images of cross-section slices located at adjustable depths inside 3-D objects. The microscope is based on a Michelson-type polarization interferometer. A light emitting diode (LED), used as an optical source at λ = 840 nm with short coherence length, provides optical sectioning ability with better than 10 μm resolution in the depth dimension. By using high numerical aperture objective lenses (NA = 0.95), the depth resolution can be improved to better than 1 μm, in good agreement with theory. Images can be produced at the rate of 50 per second using a multiplexed lock-in detection and MMX assembler-optimized calculation routines. Cross-section images inside an onion and at different depths in a multilayer silicon integrated circuit are presented.
AB - We have built an interference microscope that produces in real-time images of cross-section slices located at adjustable depths inside 3-D objects. The microscope is based on a Michelson-type polarization interferometer. A light emitting diode (LED), used as an optical source at λ = 840 nm with short coherence length, provides optical sectioning ability with better than 10 μm resolution in the depth dimension. By using high numerical aperture objective lenses (NA = 0.95), the depth resolution can be improved to better than 1 μm, in good agreement with theory. Images can be produced at the rate of 50 per second using a multiplexed lock-in detection and MMX assembler-optimized calculation routines. Cross-section images inside an onion and at different depths in a multilayer silicon integrated circuit are presented.
M3 - Conference contribution
AN - SCOPUS:0032659022
SN - 0819430757
T3 - Proceedings of SPIE - The International Society for Optical Engineering
SP - 13
EP - 20
BT - Proceedings of SPIE - The International Society for Optical Engineering
PB - Society of Photo-Optical Instrumentation Engineers
T2 - Proceedings of the 1999 Three-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing VI
Y2 - 24 January 1999 through 25 January 1999
ER -