Résumé
Capacitive discharges have classically been modeled in the electrostatic approximation. However, electromagnetic effects become significant if the excitation wavelength λ and the plasma skin depth δ are not infinite. An electromagnetic model valid in the entire range of λ and δ of practical interest is solved. We find that the plasma may either be sustained by the usual capacitive (E) field or by an inductive (H) field, and that the discharge experiences E to H transitions as the voltage between the electrodes is raised.
| langue originale | Anglais |
|---|---|
| Numéro d'article | 205001 |
| journal | Physical Review Letters |
| Volume | 95 |
| Numéro de publication | 20 |
| Les DOIs | |
| état | Publié - 11 nov. 2005 |
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