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Inductive heating and e to H transitions in capacitive discharges

  • P. Chabert
  • , J. L. Raimbault
  • , P. Levif
  • , J. M. Rax
  • , M. A. Lieberman
  • University of California

Résultats de recherche: Contribution à un journalArticleRevue par des pairs

Résumé

Capacitive discharges have classically been modeled in the electrostatic approximation. However, electromagnetic effects become significant if the excitation wavelength λ and the plasma skin depth δ are not infinite. An electromagnetic model valid in the entire range of λ and δ of practical interest is solved. We find that the plasma may either be sustained by the usual capacitive (E) field or by an inductive (H) field, and that the discharge experiences E to H transitions as the voltage between the electrodes is raised.

langue originaleAnglais
Numéro d'article205001
journalPhysical Review Letters
Volume95
Numéro de publication20
Les DOIs
étatPublié - 11 nov. 2005

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