Large-area dielectric and metallic freestanding gratings for midinfrared optical filtering applications

Gŕgory Vincent; St́phane Collin; Nathalie Bardou; Jean Luc Pelouard; Riad Hadar

doi:10.1116/1.2998728

Large-area dielectric and metallic freestanding gratings for midinfrared optical filtering applications

Gŕgory Vincent
, St́phane Collin
, Nathalie Bardou
, Jean Luc Pelouard
, Riad Hadar

Centre de Nanosciences et de Nanotechnologies
ONERA Office National d'Etudes et Recherches Aerospatiales

Résultats de recherche: Contribution à un journal › Article › Revue par des pairs

23 Citations (Scopus)

Résumé

The authors present a fabrication process of large-area (1.7×1.7 mm2) dielectric and metal-coated lamellar freestanding gratings structured at the micrometer scale. Both the stress management and the drying problems have been carefully optimized for the fabrication of drilled membranes. Transmission spectra measurements of freestanding gold-coated gratings demonstrate the achievement of high quality, accurately controlled optical filters in the midinfrared wavelength range.

langue originale	Anglais
Pages (de - à)	1852-1855
Nombre de pages	4
journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	26
Numéro de publication	6
Les DOIs	https://doi.org/10.1116/1.2998728
état	Publié - 11 déc. 2008
Modification externe	Oui

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10.1116/1.2998728

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abstract = "The authors present a fabrication process of large-area (1.7{\texttimes}1.7 mm2) dielectric and metal-coated lamellar freestanding gratings structured at the micrometer scale. Both the stress management and the drying problems have been carefully optimized for the fabrication of drilled membranes. Transmission spectra measurements of freestanding gold-coated gratings demonstrate the achievement of high quality, accurately controlled optical filters in the midinfrared wavelength range.",

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Large-area dielectric and metallic freestanding gratings for midinfrared optical filtering applications. / Vincent, Gŕgory; Collin, St́phane; Bardou, Nathalie et al.
Dans: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol 26, Numéro 6, 11.12.2008, p. 1852-1855.

Résultats de recherche: Contribution à un journal › Article › Revue par des pairs

TY - JOUR

T1 - Large-area dielectric and metallic freestanding gratings for midinfrared optical filtering applications

AU - Vincent, Gŕgory

AU - Collin, St́phane

AU - Bardou, Nathalie

AU - Pelouard, Jean Luc

AU - Hadar, Riad

PY - 2008/12/11

Y1 - 2008/12/11

N2 - The authors present a fabrication process of large-area (1.7×1.7 mm2) dielectric and metal-coated lamellar freestanding gratings structured at the micrometer scale. Both the stress management and the drying problems have been carefully optimized for the fabrication of drilled membranes. Transmission spectra measurements of freestanding gold-coated gratings demonstrate the achievement of high quality, accurately controlled optical filters in the midinfrared wavelength range.

AB - The authors present a fabrication process of large-area (1.7×1.7 mm2) dielectric and metal-coated lamellar freestanding gratings structured at the micrometer scale. Both the stress management and the drying problems have been carefully optimized for the fabrication of drilled membranes. Transmission spectra measurements of freestanding gold-coated gratings demonstrate the achievement of high quality, accurately controlled optical filters in the midinfrared wavelength range.

U2 - 10.1116/1.2998728

DO - 10.1116/1.2998728

M3 - Article

AN - SCOPUS:57249108252

SN - 1071-1023

VL - 26

SP - 1852

EP - 1855

JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

IS - 6

ER -

Large-area dielectric and metallic freestanding gratings for midinfrared optical filtering applications

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