Résumé
Practical realizations of 2D (planar) photonics crystal (PhC) are either on a membrane or etched through a conventional heterostructure. While fascinating objects can emerge from the first approach, only the latter approach lends itself to a progressive integration of more compact PhC's towards monolithic PICs based on InP. We describe in this talk the various aspects from technology to functions and devices, as emerged from the European collaboration "PCIC". The main technology tour de force is deep-etching with aspect ratio of about 10 and vertical sidewall, achieved by three techniques (CAIBE, ICP-RIE, ECR-RIE). The basic functions explored are bends, splitters/combiners, mirrors, tapers, and the devices are filters and lasers. At the end of the talk, I will emphasize some positive aspects of "broad" multimode PhC waveguides, in view of compact add-drop filtering action, notably.
| langue originale | Anglais |
|---|---|
| Pages (de - à) | 119-128 |
| Nombre de pages | 10 |
| journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 5360 |
| Les DOIs | |
| état | Publié - 14 sept. 2004 |
| Modification externe | Oui |
| Evénement | Photonic Crystal Materials and Devices II - San Jose, CA, États-Unis Durée: 26 janv. 2004 → 29 janv. 2004 |
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