@inproceedings{78a68143a2944ce5bec174c569d5f8dc,
title = "Micro-nanostructuring by optical-lithography and nitriding of photo-patternable ZrO2 sol-gel to obtain micro-nanostructured ZrN",
abstract = "Zirconium nitride (ZrN) combines plasmonic properties in the visible and near infrared spectral region with good mechanical properties, high thermal and chemical stability making it a very promising alternative to noble metals for optical applications at high temperature or in extreme environments. The authors present a new process for the elaboration of micro-nanostructured ZrN from a photo-patternable ZrO2 sol-gel and a nitridation process, by rapid thermal annealing. This sol-gel is patternable by optical lithography, it allows to easily and quickly produce patterned ZrN layer.",
keywords = "Micro-nanostructuring, Multiscale structuring, Optical properties, Rapid thermal nitridation, Sol-gel method, Zirconium nitride",
author = "V. Vallejo-Otero and N. Crespo-Monteiro and A. Valour and C. Donnet and S. Reynaud and N. Ollier and \{Blanc Mignon\}, \{M. F.\} and Chatelon, \{J. P.\} and Y. Bleu and E. Gamet and Y. Jourlin",
note = "Publisher Copyright: {\textcopyright} 2024 SPIE.; Advances in Optical Thin Films VIII 2024 ; Conference date: 08-04-2024 Through 11-04-2024",
year = "2024",
month = jan,
day = "1",
doi = "10.1117/12.3016633",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Michel Lequime and Detlev Ristau",
booktitle = "Advances in Optical Thin Films VIII",
}