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Microcrystalline Si TFTs for integrated multiplexers and shift registers

  • Philips Research

Résultats de recherche: Contribution à un journalArticle de conférenceRevue par des pairs

2 Citations (Scopus)

Résumé

We report on top gate microcrystalline Si TFT fabrication, device measurements and modelling of integrated drivers for AMLCDs. Microcrystalline silicon TFTs can be made with a simple process and have low mobility, similar to amorphous silicon TFTs, but they also have outstanding stability. Modelling shows that stable TFTs with low mobility can be used for making medium sized AMLCDs with row drivers and column multiplexers. Small increases in mobility would greatly extend their application range.

langue originaleAnglais
Pages (de - à)367-370
Nombre de pages4
journalSID Conference Record of the International Display Research Conference
étatPublié - 1 déc. 2001
EvénementAsia Display/IDW 2001 - Nagoya, Japon
Durée: 16 oct. 200219 oct. 2002

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