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Microfabricated textured surfaces for super-hydrophobicity investigations

  • Mathilde Callies
  • , Yong Chen
  • , Frédéric Marty
  • , Anne Pépin
  • , David Quéré
  • CNRS
  • PSL research University & IPSL
  • Groupe ESIEE

Résultats de recherche: Contribution à un journalArticle de conférenceRevue par des pairs

Résumé

The natural hydrophobicity of surfaces can be enhanced if they are micro-textured. This is due to air trapped in the structure, which provides the deposited drop with a composite surface made of solid and air on which it is resting. Here, we give evidence for this effect using a forest of micro-pillars which allows us to control the micro structure density under the drop, and thus the degree of super-hydrophobicity. For this purpose, silicon wafers were firstly patterned by conventional photolithography techniques. After deposition of an aluminium layer, the samples were subjected to a deep reactive ion etching (DRIE) with the "Bosch process" in order to achieve high aspect ratios (≥10). However, this state is not always the most stable situation for a drop on a hydrophobic surface: the drop can also fill up the microstructure. We have been able to observe these two super-hydrophobic states on our surfaces and to characterize advancing and receding contact angles for both of them.

langue originaleAnglais
Pages (de - à)100-105
Nombre de pages6
journalMicroelectronic Engineering
Volume78-79
Numéro de publication1-4
Les DOIs
étatPublié - 1 mars 2005
EvénementProceedings of the 30th International Conference on Micro- and Nano-Engineering -
Durée: 19 sept. 200422 sept. 2004

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