Résumé
The natural hydrophobicity of surfaces can be enhanced if they are micro-textured. This is due to air trapped in the structure, which provides the deposited drop with a composite surface made of solid and air on which it is resting. Here, we give evidence for this effect using a forest of micro-pillars which allows us to control the micro structure density under the drop, and thus the degree of super-hydrophobicity. For this purpose, silicon wafers were firstly patterned by conventional photolithography techniques. After deposition of an aluminium layer, the samples were subjected to a deep reactive ion etching (DRIE) with the "Bosch process" in order to achieve high aspect ratios (≥10). However, this state is not always the most stable situation for a drop on a hydrophobic surface: the drop can also fill up the microstructure. We have been able to observe these two super-hydrophobic states on our surfaces and to characterize advancing and receding contact angles for both of them.
| langue originale | Anglais |
|---|---|
| Pages (de - à) | 100-105 |
| Nombre de pages | 6 |
| journal | Microelectronic Engineering |
| Volume | 78-79 |
| Numéro de publication | 1-4 |
| Les DOIs | |
| état | Publié - 1 mars 2005 |
| Evénement | Proceedings of the 30th International Conference on Micro- and Nano-Engineering - Durée: 19 sept. 2004 → 22 sept. 2004 |
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