Résumé
Nanoporous alumina templates are demonstrated as device structures for nanowire field-effect transistors (FETs). A ZnO nanowire surroundinggate FET demonstrates the utility of this nanostructured template. This bottom-up approach is unique in that the fabrication can be almost entirely done using room temperature electrochemistry. The technique is extended to lateral anodized nanoporous aluminum thin-films, compatible with standard silicon technology and illustrated by the possible fabrication of an active matrix backplane with only four lithographic masks.
| langue originale | Anglais |
|---|---|
| titre | Nanostructures in Electronics and Photonics |
| Editeur | Pan Stanford Publishing Pte. Ltd. |
| Pages | 41-61 |
| Nombre de pages | 21 |
| ISBN (imprimé) | 9789814241106 |
| Les DOIs | |
| état | Publié - 1 avr. 2008 |
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