TY - GEN
T1 - Nonlinear uncertainty propagation of on-wafer mixed-mode S parameter measurements using Multimode-TRL calibration
AU - Pham, Thi Dao
AU - Allal, Djamel
AU - Ziade, Francois
AU - Bergeault, Eric
N1 - Publisher Copyright:
© 2020 IEEE.
PY - 2020/8/1
Y1 - 2020/8/1
N2 - Full characterization of differential microwave circuits is traditionally performed by measuring their mixed mode scattering (S) parameters using a four-port vector network analyzer. This paper describes an evaluation of the uncertainty of on-wafer mixed-mode S parameter measurements carried out using a Multimode Thru-Reflect-Line (TRL) calibration kit based on coupled coplanar waveguide (CCPW) standards, developed on silicon dioxide substrate in the Ground-Signal-Ground-Signal-Ground (GSGSG) configuration and associated verification standards. In addition to the influence quantities linked with the measurement instrument and the uncertainty due to the calibration standards, measurement repeatability is evaluated. For the first time, potentially nonlinear uncertainty propagation through the Multimode-TRL calibration algorithm is shown, which can make it unsuitable when using embedded balanced calibration standards and degraded input uncertainties.
AB - Full characterization of differential microwave circuits is traditionally performed by measuring their mixed mode scattering (S) parameters using a four-port vector network analyzer. This paper describes an evaluation of the uncertainty of on-wafer mixed-mode S parameter measurements carried out using a Multimode Thru-Reflect-Line (TRL) calibration kit based on coupled coplanar waveguide (CCPW) standards, developed on silicon dioxide substrate in the Ground-Signal-Ground-Signal-Ground (GSGSG) configuration and associated verification standards. In addition to the influence quantities linked with the measurement instrument and the uncertainty due to the calibration standards, measurement repeatability is evaluated. For the first time, potentially nonlinear uncertainty propagation through the Multimode-TRL calibration algorithm is shown, which can make it unsuitable when using embedded balanced calibration standards and degraded input uncertainties.
KW - Coplanar waveguide
KW - differential circuits
KW - mixed-mode S parameters
KW - nonlinear uncertainty propagation
KW - on-wafer microwave measurements
KW - vector network analyzer
U2 - 10.1109/CPEM49742.2020.9191841
DO - 10.1109/CPEM49742.2020.9191841
M3 - Conference contribution
AN - SCOPUS:85092160129
T3 - CPEM Digest (Conference on Precision Electromagnetic Measurements)
BT - 2020 Conference on Precision Electromagnetic Measurements, CPEM 2020
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2020 Conference on Precision Electromagnetic Measurements, CPEM 2020
Y2 - 24 August 2020 through 28 August 2020
ER -