Novel holographic setup to realize on-chip photolithographic mask for bragg grating inscription

Many applications of integrated optics, related especially to multi-wavelength telecommunications, require the use of dichroïc reflectors enabling the achievement of narrow or broad-band wavelength selective filters. Bragg mirrors in particular are very good candidate for that purpose. In this paper, we describe the design of a holographic setup used to record a photolithographic mask directly on the substrate, enabling the inscription of a periodic and aperiodic parameters waveguides. This holographic setup, based on a triangular interferometer allows a very precise adjustment of the fringe spacing of a interference pattern and at the same time maintains great stability against the external perturbations.