Optimization of the wave front of high order harmonics

We present a full optimization of the high harmonics wave front owing to the use of a soft X-ray Hartmann sensor. The sensor was calibrated using a high harmonic source with an accuracy of λ/50 root-mean-square (rms) with λ around 30 nm. We observed a high harmonic wave front of λ/7 rms, which is two times the diffraction-limit, astigmatism being the dominant aberration for every condition of generation. By clipping slightly the unfocused high harmonic beam, it is possible to produce a diffraction-limited beam containing approximately 90% of the incident energy.