Probing dusty-plasma/surface interactions with a heat flux microsensor

S. N. Abolmasov; P. A. Cormier; A. Torres Rios; R. Dussart; N. Semmar; A. L. Thomann; P. Roca I Cabarrocas

doi:10.1063/1.3674290

Probing dusty-plasma/surface interactions with a heat flux microsensor

S. N. Abolmasov
, P. A. Cormier
, A. Torres Rios
, R. Dussart
, N. Semmar
, A. L. Thomann
, P. Roca I Cabarrocas

GREMI Groupe de Recherches sur l'Energetique des Milieux Ionises

Résultats de recherche: Contribution à un journal › Article › Revue par des pairs

7 Citations (Scopus)

Résumé

Heat flux microsensor-a thermopile with millisecond response time-was employed for direct measurements of total energy flux to a floated surface in a dusty rf discharge. The measurements were performed in silane-hydrogen plasmas at discharge conditions close to those used for the growth of polymorphous silicon films. At rf power between 10 and 50 W, the measured energy flux was in the range of 20-250 mW/cm ². Due to fast time response, the thermopile was also capable of tracing the dynamics of nanoparticle growth. A significant decrease (about 30) in the energy flux was observed during the agglomeration phase.

langue originale	Anglais
Numéro d'article	011601
journal	Applied Physics Letters
Volume	100
Numéro de publication	1
Les DOIs	https://doi.org/10.1063/1.3674290
état	Publié - 2 janv. 2012

Accès au document

10.1063/1.3674290

Contient cette citation

@article{640d847777af4fbf8f26afc4a01be553,

title = "Probing dusty-plasma/surface interactions with a heat flux microsensor",

abstract = "Heat flux microsensor-a thermopile with millisecond response time-was employed for direct measurements of total energy flux to a floated surface in a dusty rf discharge. The measurements were performed in silane-hydrogen plasmas at discharge conditions close to those used for the growth of polymorphous silicon films. At rf power between 10 and 50 W, the measured energy flux was in the range of 20-250 mW/cm 2. Due to fast time response, the thermopile was also capable of tracing the dynamics of nanoparticle growth. A significant decrease (about 30) in the energy flux was observed during the agglomeration phase.",

author = "Abolmasov, \{S. N.\} and Cormier, \{P. A.\} and \{Torres Rios\}, A. and R. Dussart and N. Semmar and Thomann, \{A. L.\} and \{Roca I Cabarrocas\}, P.",

year = "2012",

month = jan,

day = "2",

doi = "10.1063/1.3674290",

language = "English",

volume = "100",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "1",

}

TY - JOUR

T1 - Probing dusty-plasma/surface interactions with a heat flux microsensor

AU - Abolmasov, S. N.

AU - Cormier, P. A.

AU - Torres Rios, A.

AU - Dussart, R.

AU - Semmar, N.

AU - Thomann, A. L.

AU - Roca I Cabarrocas, P.

PY - 2012/1/2

Y1 - 2012/1/2

N2 - Heat flux microsensor-a thermopile with millisecond response time-was employed for direct measurements of total energy flux to a floated surface in a dusty rf discharge. The measurements were performed in silane-hydrogen plasmas at discharge conditions close to those used for the growth of polymorphous silicon films. At rf power between 10 and 50 W, the measured energy flux was in the range of 20-250 mW/cm 2. Due to fast time response, the thermopile was also capable of tracing the dynamics of nanoparticle growth. A significant decrease (about 30) in the energy flux was observed during the agglomeration phase.

AB - Heat flux microsensor-a thermopile with millisecond response time-was employed for direct measurements of total energy flux to a floated surface in a dusty rf discharge. The measurements were performed in silane-hydrogen plasmas at discharge conditions close to those used for the growth of polymorphous silicon films. At rf power between 10 and 50 W, the measured energy flux was in the range of 20-250 mW/cm 2. Due to fast time response, the thermopile was also capable of tracing the dynamics of nanoparticle growth. A significant decrease (about 30) in the energy flux was observed during the agglomeration phase.

U2 - 10.1063/1.3674290

DO - 10.1063/1.3674290

M3 - Article

AN - SCOPUS:84855523843

SN - 0003-6951

VL - 100

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 1

M1 - 011601

ER -

Probing dusty-plasma/surface interactions with a heat flux microsensor

Résumé

Accès au document

Empreinte digitale

Contient cette citation