Radical dynamics in unstable CF4 inductive discharges

P. Chabert; H. Abada; J. P. Booth; M. A. Lieberman

doi:10.1063/1.1578175

Radical dynamics in unstable CF₄ inductive discharges

P. Chabert
, H. Abada
, J. P. Booth
, M. A. Lieberman

University of California

Résultats de recherche: Contribution à un journal › Article › Revue par des pairs

Résumé

Instabilities in plasma in pure CF₄ gas excited at 13.56 MHz by planar spiral coil through an alumina window was studied. The free radical dynamics were investigated using space and time-resolved laser-induced fluorescence. The rate coefficients for CF₄ were incorporated and an expression for the positive ion flux in the low electronegativity case was developed.

langue originale	Anglais
Pages (de - à)	76-84
Nombre de pages	9
journal	Journal of Applied Physics
Volume	94
Numéro de publication	1
Les DOIs	https://doi.org/10.1063/1.1578175
état	Publié - 1 juil. 2003

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10.1063/1.1578175

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@article{99154bd3f0fe47da81a94814b4f4ef29,

title = "Radical dynamics in unstable CF4 inductive discharges",

abstract = "Instabilities in plasma in pure CF4 gas excited at 13.56 MHz by planar spiral coil through an alumina window was studied. The free radical dynamics were investigated using space and time-resolved laser-induced fluorescence. The rate coefficients for CF4 were incorporated and an expression for the positive ion flux in the low electronegativity case was developed.",

author = "P. Chabert and H. Abada and Booth, \{J. P.\} and Lieberman, \{M. A.\}",

year = "2003",

month = jul,

day = "1",

doi = "10.1063/1.1578175",

language = "English",

volume = "94",

pages = "76--84",

journal = "Journal of Applied Physics",

issn = "0021-8979",

number = "1",

}

TY - JOUR

T1 - Radical dynamics in unstable CF4 inductive discharges

AU - Chabert, P.

AU - Abada, H.

AU - Booth, J. P.

AU - Lieberman, M. A.

PY - 2003/7/1

Y1 - 2003/7/1

N2 - Instabilities in plasma in pure CF4 gas excited at 13.56 MHz by planar spiral coil through an alumina window was studied. The free radical dynamics were investigated using space and time-resolved laser-induced fluorescence. The rate coefficients for CF4 were incorporated and an expression for the positive ion flux in the low electronegativity case was developed.

AB - Instabilities in plasma in pure CF4 gas excited at 13.56 MHz by planar spiral coil through an alumina window was studied. The free radical dynamics were investigated using space and time-resolved laser-induced fluorescence. The rate coefficients for CF4 were incorporated and an expression for the positive ion flux in the low electronegativity case was developed.

U2 - 10.1063/1.1578175

DO - 10.1063/1.1578175

M3 - Article

AN - SCOPUS:0042843303

SN - 0021-8979

VL - 94

SP - 76

EP - 84

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 1

ER -

Radical dynamics in unstable CF4 inductive discharges

Résumé

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Radical dynamics in unstable CF₄ inductive discharges