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Recent advances in the modeling and computer simulations of non-equilibrium plasma discharges

  • Laxminarayan L. Raja
  • , Anne Bourdon
  • , Peter L.G. Ventzek
  • University of Texas at Austin
  • Tokyo Electron America Inc.

Résultats de recherche: Contribution à un journalArticleRevue par des pairs

Résumé

The mathematical modeling and computer simulation of low-temperature plasmas is gradually such a level of maturity that these simulation tools can be used not just for improving scientific understanding but also as computer-aided engineering design tools in an industrial setting. These models necessarily involve the description of multiple physical phenomena occurring over a range of times and lengths, thereby complicating their numerical implementation and solution. This special issue presents 12 invited contributions that present recent developments in the field of modeling and simulation of low-temperature plasma discharges. This editorial introduces these papers by providing an overview of the context in which these papers are presented.

langue originaleAnglais
Numéro d'article150202
journalJournal of Physics D: Applied Physics
Volume51
Numéro de publication15
Les DOIs
étatPublié - 1 janv. 2018
Modification externeOui

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