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Self-consistent nonlinear transmission line model of standing wave effects in a capacitive discharge

  • P. Chabert
  • , J. L. Raimbault
  • , J. M. Rax
  • , M. A. Lieberman
  • University of California

Résultats de recherche: Contribution à un journalArticleRevue par des pairs

121 Citations (Scopus)

Résumé

Two different global discharge models was coupled to a transmission line model to obtain the self consistent characteristics of the standing wave effect. A hamiltonian description was used to obtain an analytical expression for the wavelength and to determine the dependence of wavelength upon the main control parameters. The value of wavelength divided by wavelength in vacuum gives a direct measure of the amplitude of nonuniformities induced by the standing wave effect. The models limitation and possible area of improvement were also discussed.

langue originaleAnglais
Pages (de - à)1775-1785
Nombre de pages11
journalPhysics of Plasmas
Volume11
Numéro de publication5 PART 1
Les DOIs
étatPublié - 1 mai 2004

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