Simulation of spectroscopic ellipsometry for dielectric lamellar gratings

Koki Watanabe; Jaromír Pištora; Martin Foldyna; Kamil Postava; Jaroslav Vlček

doi:10.1109/mmet.2004.1397097

Simulation of spectroscopic ellipsometry for dielectric lamellar gratings

Koki Watanabe
, Jaromír Pištora
, Martin Foldyna
, Kamil Postava
, Jaroslav Vlček

Fukuoka Institute of Technology
Technical University Ostrava

Résultats de recherche: Contribution à une conférence › Papier › Revue par des pairs

Résumé

Spectroscopic ellipsometry for lamellar gratings made of lossless dielectric materials is numerically investigated by using the rigorous coupled-wave formulation based on Li's Fourier factorization rules. Accurate values of the ellipsometric angles are obtained with small number of Fourier components, and it is shown that accurate estimation of the grating parameters is possible in reasonable computation time.

langue originale	Anglais
Pages	501-503
Nombre de pages	3
Les DOIs	https://doi.org/10.1109/mmet.2004.1397097
état	Publié - 1 janv. 2004
Modification externe	Oui
Evénement	Conference Proceedings - 10th International Conference on Mathematical Methods in Electromagnetic Theory, MMET'04 - Dniepropetrovsk, Ukraine Durée: 14 sept. 2004 → 17 sept. 2004

Une conférence

Une conférence	Conference Proceedings - 10th International Conference on Mathematical Methods in Electromagnetic Theory, MMET'04
Pays/Territoire	Ukraine
La ville	Dniepropetrovsk
période	14/09/04 → 17/09/04

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10.1109/mmet.2004.1397097

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@conference{198655b708314773a7bbc35617e5b58f,

title = "Simulation of spectroscopic ellipsometry for dielectric lamellar gratings",

abstract = "Spectroscopic ellipsometry for lamellar gratings made of lossless dielectric materials is numerically investigated by using the rigorous coupled-wave formulation based on Li's Fourier factorization rules. Accurate values of the ellipsometric angles are obtained with small number of Fourier components, and it is shown that accurate estimation of the grating parameters is possible in reasonable computation time.",

author = "Koki Watanabe and Jarom{\'i}r Pi{\v s}tora and Martin Foldyna and Kamil Postava and Jaroslav Vl{\v c}ek",

year = "2004",

month = jan,

day = "1",

doi = "10.1109/mmet.2004.1397097",

language = "English",

pages = "501--503",

note = "Conference Proceedings - 10th International Conference on Mathematical Methods in Electromagnetic Theory, MMET'04 ; Conference date: 14-09-2004 Through 17-09-2004",

}

Watanabe, K, Pištora, J, Foldyna, M, Postava, K & Vlček, J 2004, 'Simulation of spectroscopic ellipsometry for dielectric lamellar gratings', Papier présenté � Conference Proceedings - 10th International Conference on Mathematical Methods in Electromagnetic Theory, MMET'04, Dniepropetrovsk, Ukraine, 14/09/04 - 17/09/04 p. 501-503. https://doi.org/10.1109/mmet.2004.1397097

Simulation of spectroscopic ellipsometry for dielectric lamellar gratings. / Watanabe, Koki; Pištora, Jaromír; Foldyna, Martin et al.
2004. 501-503 Papier présenté � Conference Proceedings - 10th International Conference on Mathematical Methods in Electromagnetic Theory, MMET'04, Dniepropetrovsk, Ukraine.

Résultats de recherche: Contribution à une conférence › Papier › Revue par des pairs

TY - CONF

T1 - Simulation of spectroscopic ellipsometry for dielectric lamellar gratings

AU - Watanabe, Koki

AU - Pištora, Jaromír

AU - Foldyna, Martin

AU - Postava, Kamil

AU - Vlček, Jaroslav

PY - 2004/1/1

Y1 - 2004/1/1

N2 - Spectroscopic ellipsometry for lamellar gratings made of lossless dielectric materials is numerically investigated by using the rigorous coupled-wave formulation based on Li's Fourier factorization rules. Accurate values of the ellipsometric angles are obtained with small number of Fourier components, and it is shown that accurate estimation of the grating parameters is possible in reasonable computation time.

AB - Spectroscopic ellipsometry for lamellar gratings made of lossless dielectric materials is numerically investigated by using the rigorous coupled-wave formulation based on Li's Fourier factorization rules. Accurate values of the ellipsometric angles are obtained with small number of Fourier components, and it is shown that accurate estimation of the grating parameters is possible in reasonable computation time.

UR - https://www.scopus.com/pages/publications/13344284588

U2 - 10.1109/mmet.2004.1397097

DO - 10.1109/mmet.2004.1397097

M3 - Paper

AN - SCOPUS:13344284588

SP - 501

EP - 503

T2 - Conference Proceedings - 10th International Conference on Mathematical Methods in Electromagnetic Theory, MMET'04

Y2 - 14 September 2004 through 17 September 2004

ER -

Simulation of spectroscopic ellipsometry for dielectric lamellar gratings

Résumé

Une conférence

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