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Size Distribution of Embedded Nano-Crystallites in Polymorphous Silicon Studied by Raman Spectroscopy and Photoluminescence

  • Indian Institute of Technology Kanpur
  • Indian Space Research Organisation
  • Institut polytechnique de Paris

Résultats de recherche: Contribution à un journalArticle de conférenceRevue par des pairs

Résumé

Polymorphous Silicon (pm-Si:H) deposited by Plasma Enhanced Chemical Vapour Deposition (PECVD) has emerged as an alternative material to amorphous silicon (a-Si:H). Deposition parameters of pm-Si:H are such that small crystallites get embedded in a relaxed amorphous silicon matrix, thus improving the optical and electrical properties. We study the size of crystallites and degree of order in pm-Si:H using Raman and photoluminescence (PL) spectra of pm-Si:H and a-Si:H. Raman Spectra of a variety of hydrogenated nanostructured silicon (pm-Si:H) and amorphous Silicon (a-Si:H) samples grown at different pressures were analyzed. Deconvolution of observed multiple peaks in photoluminescence spectra and fitting to Gaussian size distribution also yields particle size to be in the range of 2.3 to 3.5nm in agreement with Transmission Electron Microscopy and Raman results.

langue originaleAnglais
Pages (de - à)105-110
Nombre de pages6
journalMaterials Research Society Symposium - Proceedings
Volume762
Les DOIs
étatPublié - 1 janv. 2003
EvénementMaterials Research Proceedings: Amorphous and Nanocrystalline Silicon-Based Films - 2003 - San Francisco, CA, États-Unis
Durée: 22 avr. 200325 avr. 2003

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