Stable and unstable behavior of inductively coupled electronegative discharges

A. M. Marakhtanov; M. Tuszewski; M. A. Lieberman; A. J. Lichtenberg; P. Chabert

doi:10.1116/1.1613953

Stable and unstable behavior of inductively coupled electronegative discharges

A. M. Marakhtanov
, M. Tuszewski
, M. A. Lieberman
, A. J. Lichtenberg
, P. Chabert

University of California
MST-8, Los Alamos National Laboratory

Résultats de recherche: Contribution à un journal › Article › Revue par des pairs

Résumé

Plasma instabilities in low-pressure inductive discharges were studied. It was found experimentally that the discharge may be unstable in the transition from a low density capacitive to a high density inductive mode of operation, when attaching gases such as SF₆ or Ar/SF₆ mixtures are used such that the plasma contains negative ions. The importance of capacitive coupling was confirmed.

langue originale	Anglais
Pages (de - à)	1849-1864
Nombre de pages	16
journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	21
Numéro de publication	6
Les DOIs	https://doi.org/10.1116/1.1613953
état	Publié - 1 nov. 2003

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10.1116/1.1613953

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title = "Stable and unstable behavior of inductively coupled electronegative discharges",

abstract = "Plasma instabilities in low-pressure inductive discharges were studied. It was found experimentally that the discharge may be unstable in the transition from a low density capacitive to a high density inductive mode of operation, when attaching gases such as SF6 or Ar/SF6 mixtures are used such that the plasma contains negative ions. The importance of capacitive coupling was confirmed.",

author = "Marakhtanov, \{A. M.\} and M. Tuszewski and Lieberman, \{M. A.\} and Lichtenberg, \{A. J.\} and P. Chabert",

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T1 - Stable and unstable behavior of inductively coupled electronegative discharges

AU - Marakhtanov, A. M.

AU - Tuszewski, M.

AU - Lieberman, M. A.

AU - Lichtenberg, A. J.

AU - Chabert, P.

PY - 2003/11/1

Y1 - 2003/11/1

N2 - Plasma instabilities in low-pressure inductive discharges were studied. It was found experimentally that the discharge may be unstable in the transition from a low density capacitive to a high density inductive mode of operation, when attaching gases such as SF6 or Ar/SF6 mixtures are used such that the plasma contains negative ions. The importance of capacitive coupling was confirmed.

AB - Plasma instabilities in low-pressure inductive discharges were studied. It was found experimentally that the discharge may be unstable in the transition from a low density capacitive to a high density inductive mode of operation, when attaching gases such as SF6 or Ar/SF6 mixtures are used such that the plasma contains negative ions. The importance of capacitive coupling was confirmed.

U2 - 10.1116/1.1613953

DO - 10.1116/1.1613953

M3 - Article

AN - SCOPUS:0842290169

SN - 0734-2101

VL - 21

SP - 1849

EP - 1864

JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

IS - 6

ER -

Stable and unstable behavior of inductively coupled electronegative discharges

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