Synthesis of carbon nanbotubes by plasma-enhanced CVD process: Gas phase study of synthesis conditions

M. Guláš; C. S. Cojocaru; C. T. Fleaca; S. Farhat; P. Veis; F. Le Normand

doi:10.1051/epjap:2008111

Synthesis of carbon nanbotubes by plasma-enhanced CVD process: Gas phase study of synthesis conditions

M. Guláš
, C. S. Cojocaru
, C. T. Fleaca
, S. Farhat
, P. Veis
, F. Le Normand

UMR 7504 CNRS-ULP
Comenius University
Université Paris 13

Résultats de recherche: Contribution à un journal › Article › Revue par des pairs

Résumé

To support experimental investigations, a model based on Chemkin software was used to simulate gas phase and surface chemistry during plasma-enhanced catalytic CVD of carbon nanotubes. According to these calculations, gas phase composition, etching process and growth rates are calculated. The role of several carbon species, hydrocarbon molecules and ions in the growth mechanism of carbon nanotubes is presented in this study. Study of different conditions of gas phase activation sources and pressure is performed.

langue originale	Anglais
Pages (de - à)	353-356
Nombre de pages	4
journal	EPJ Applied Physics
Volume	43
Numéro de publication	3
Les DOIs	https://doi.org/10.1051/epjap:2008111
état	Publié - 1 sept. 2008
Modification externe	Oui

Accès au document

10.1051/epjap:2008111

Contient cette citation

@article{16ce5c476ff1478183f2fc6dffca3c6c,

title = "Synthesis of carbon nanbotubes by plasma-enhanced CVD process: Gas phase study of synthesis conditions",

abstract = "To support experimental investigations, a model based on Chemkin software was used to simulate gas phase and surface chemistry during plasma-enhanced catalytic CVD of carbon nanotubes. According to these calculations, gas phase composition, etching process and growth rates are calculated. The role of several carbon species, hydrocarbon molecules and ions in the growth mechanism of carbon nanotubes is presented in this study. Study of different conditions of gas phase activation sources and pressure is performed.",

author = "M. Gul{\'a}{\v s} and Cojocaru, \{C. S.\} and Fleaca, \{C. T.\} and S. Farhat and P. Veis and \{Le Normand\}, F.",

year = "2008",

month = sep,

day = "1",

doi = "10.1051/epjap:2008111",

language = "English",

volume = "43",

pages = "353--356",

journal = "EPJ Applied Physics",

issn = "1286-0042",

number = "3",

}

TY - JOUR

T1 - Synthesis of carbon nanbotubes by plasma-enhanced CVD process

T2 - Gas phase study of synthesis conditions

AU - Guláš, M.

AU - Cojocaru, C. S.

AU - Fleaca, C. T.

AU - Farhat, S.

AU - Veis, P.

AU - Le Normand, F.

PY - 2008/9/1

Y1 - 2008/9/1

N2 - To support experimental investigations, a model based on Chemkin software was used to simulate gas phase and surface chemistry during plasma-enhanced catalytic CVD of carbon nanotubes. According to these calculations, gas phase composition, etching process and growth rates are calculated. The role of several carbon species, hydrocarbon molecules and ions in the growth mechanism of carbon nanotubes is presented in this study. Study of different conditions of gas phase activation sources and pressure is performed.

AB - To support experimental investigations, a model based on Chemkin software was used to simulate gas phase and surface chemistry during plasma-enhanced catalytic CVD of carbon nanotubes. According to these calculations, gas phase composition, etching process and growth rates are calculated. The role of several carbon species, hydrocarbon molecules and ions in the growth mechanism of carbon nanotubes is presented in this study. Study of different conditions of gas phase activation sources and pressure is performed.

U2 - 10.1051/epjap:2008111

DO - 10.1051/epjap:2008111

M3 - Article

AN - SCOPUS:50849108223

SN - 1286-0042

VL - 43

SP - 353

EP - 356

JO - EPJ Applied Physics

JF - EPJ Applied Physics

IS - 3

ER -

Synthesis of carbon nanbotubes by plasma-enhanced CVD process: Gas phase study of synthesis conditions

Résumé

Accès au document

Empreinte digitale

Contient cette citation