Synthesis of crystalline structures of CNx thin films deposited on sapphire, quartz and alumina substrates

R. Alexandrescu; R. Cireasa; A. Crunteanu; C. S. Cojocaru; I. Morjan; A. Kumar; F. Vasiliu

Synthesis of crystalline structures of CN_x thin films deposited on sapphire, quartz and alumina substrates

R. Alexandrescu
, R. Cireasa
, A. Crunteanu
, C. S. Cojocaru
, I. Morjan
, A. Kumar
, F. Vasiliu

Plasma and Radiation Physics (INFLPR)
University of South-Alabama
P.O. Box MG-7

Résultats de recherche: Contribution à un journal › Article de conférence › Revue par des pairs

Résumé

Carbon nitride films raise current interest for their potential applications as ultra-hard materials. We report on the formation of crystalline CN structures in films deposited at 248 nm on different substrates (sapphire, quartz, alumina) using the laser-induced CVD method and a gas mixture containing ethylene/nitrous oxide and ammonia as carbon and nitrogen source, respectively. The structural and morphological properties of the films were characterized by different analytical techniques (SEM, TEM, TED and XPS).

langue originale	Anglais
Pages (de - à)	413-418
Nombre de pages	6
journal	Materials Research Society Symposium - Proceedings
Volume	555
état	Publié - 1 janv. 1999
Modification externe	Oui
Evénement	Proceedings of the 1998 MRS Fall Meeting - The Symposium 'Advanced Catalytic Materials-1998' - Boston, MA, USA Durée: 30 nov. 1998 → 3 déc. 1998

Contient cette citation

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title = "Synthesis of crystalline structures of CNx thin films deposited on sapphire, quartz and alumina substrates",

abstract = "Carbon nitride films raise current interest for their potential applications as ultra-hard materials. We report on the formation of crystalline CN structures in films deposited at 248 nm on different substrates (sapphire, quartz, alumina) using the laser-induced CVD method and a gas mixture containing ethylene/nitrous oxide and ammonia as carbon and nitrogen source, respectively. The structural and morphological properties of the films were characterized by different analytical techniques (SEM, TEM, TED and XPS).",

author = "R. Alexandrescu and R. Cireasa and A. Crunteanu and Cojocaru, \{C. S.\} and I. Morjan and A. Kumar and F. Vasiliu",

year = "1999",

month = jan,

day = "1",

language = "English",

volume = "555",

pages = "413--418",

journal = "Materials Research Society Symposium - Proceedings",

issn = "0272-9172",

note = "Proceedings of the 1998 MRS Fall Meeting - The Symposium 'Advanced Catalytic Materials-1998' ; Conference date: 30-11-1998 Through 03-12-1998",

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TY - JOUR

T1 - Synthesis of crystalline structures of CNx thin films deposited on sapphire, quartz and alumina substrates

AU - Alexandrescu, R.

AU - Cireasa, R.

AU - Crunteanu, A.

AU - Cojocaru, C. S.

AU - Morjan, I.

AU - Kumar, A.

AU - Vasiliu, F.

PY - 1999/1/1

Y1 - 1999/1/1

N2 - Carbon nitride films raise current interest for their potential applications as ultra-hard materials. We report on the formation of crystalline CN structures in films deposited at 248 nm on different substrates (sapphire, quartz, alumina) using the laser-induced CVD method and a gas mixture containing ethylene/nitrous oxide and ammonia as carbon and nitrogen source, respectively. The structural and morphological properties of the films were characterized by different analytical techniques (SEM, TEM, TED and XPS).

AB - Carbon nitride films raise current interest for their potential applications as ultra-hard materials. We report on the formation of crystalline CN structures in films deposited at 248 nm on different substrates (sapphire, quartz, alumina) using the laser-induced CVD method and a gas mixture containing ethylene/nitrous oxide and ammonia as carbon and nitrogen source, respectively. The structural and morphological properties of the films were characterized by different analytical techniques (SEM, TEM, TED and XPS).

M3 - Conference article

AN - SCOPUS:0032591044

SN - 0272-9172

VL - 555

SP - 413

EP - 418

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

T2 - Proceedings of the 1998 MRS Fall Meeting - The Symposium 'Advanced Catalytic Materials-1998'

Y2 - 30 November 1998 through 3 December 1998

ER -

Synthesis of crystalline structures of CNx thin films deposited on sapphire, quartz and alumina substrates

Résumé

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Contient cette citation

Synthesis of crystalline structures of CN_x thin films deposited on sapphire, quartz and alumina substrates