@article{f2a7129e9bf94197bb9574ed72eef356,
title = "Two-dimensional photonic crystals by focused-ion-beam etching of multilayer membranes",
author = "K. Wang and P. Filloux and N. Paraire and \{Roca i Cabarrocas\}, P. and P. Bulkin",
year = "2003",
month = jan,
day = "1",
doi = "10.1116/1.1568349",
language = "English",
volume = "21",
pages = "966--969",
journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",
issn = "1071-1023",
publisher = "AVS Science and Technology Society",
number = "3",
}