TY - GEN
T1 - X ray Wavefront Hartmann Sensor
AU - Mercère, Pascal
AU - Idir, Mourad
AU - Zeitoun, Philippe
AU - Levecq, Xavier
AU - Dovillaire, Guillaume
AU - Bucourt, Samuel
AU - Douillet, Denis
AU - Goldberg, Kenneth A.
AU - Naulleau, Patrick P.
AU - Rekawa, Senajith
N1 - Publisher Copyright:
© 2004 American Institute of Physics.
PY - 2004/5/12
Y1 - 2004/5/12
N2 - We report an experimental demonstration of wavefront analysis via the Hartmann technique in the EUV. The reference wave front needed to calibrate the sensor was generated by spatially filtering a focused undulator beam with 1.7 (0.6) μm pinhole. To fully characterize the sensor, accuracy and sensitivity measurements were performed. The incident beam's wavelength was varied between 7 and 25 nm. Measurements of accuracy better than λEUV=120 (0.11 nm) were obtained λEUV=13.4 nm. The wavefront of the spatially unfiltered incident beam was also measured.
AB - We report an experimental demonstration of wavefront analysis via the Hartmann technique in the EUV. The reference wave front needed to calibrate the sensor was generated by spatially filtering a focused undulator beam with 1.7 (0.6) μm pinhole. To fully characterize the sensor, accuracy and sensitivity measurements were performed. The incident beam's wavelength was varied between 7 and 25 nm. Measurements of accuracy better than λEUV=120 (0.11 nm) were obtained λEUV=13.4 nm. The wavefront of the spatially unfiltered incident beam was also measured.
UR - https://www.scopus.com/pages/publications/85012278925
U2 - 10.1063/1.1757921
DO - 10.1063/1.1757921
M3 - Conference contribution
AN - SCOPUS:85012278925
T3 - AIP Conference Proceedings
SP - 819
EP - 822
BT - Synchrotron Radiation Instrumentation
PB - American Institute of Physics Inc.
T2 - 8th International Conference on Synchrotron Radiation Instrumentation
Y2 - 25 August 2003 through 29 August 2003
ER -