In-situ analysis of gas phase decomposition and kinetic study during carbon deposition from mixtures of carbon tetrachloride and methane

Gas phase analyses and kinetic studies were carried out in-situ during the CVD of pyrocarbon from a methane/carbon tetrachloride mixture at low pressure (2 kPa) and constant flow rate (50 sccm). At low temperatures (<800 °C), it is assumed that pyrocarbon is formed from chlorinated intermediate species with an apparent activation energy of 180 kJ/mol. At higher temperatures, the apparent activation energy is 140 kJ/mol and unsaturated hydrocarbons are the most probable carbon precursors.